Radiation Effects in Advanced Semiconductor Materials and...

Radiation Effects in Advanced Semiconductor Materials and Devices

Prof. Cor Claeys, Dr. Eddy Simoen (auth.)
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In the modern semiconductor industry, there is a growing need to understand and combat potential radiation damage problems. Space applications are an obvious case, but, beyond that, today's device and circuit fabrication rely on increasing numbers of processing steps that involve an aggressive environment where inadvertant radiation damage can occur. This book is both aimed at post-graduate researchers seeking an overview of the field, and will also be immensely useful for nuclear and space engineers and even process engineers. A background knowledge of semiconductor and device physics is assumed, but the basic concepts are all briefly summarized. Finally the book outlines the shortcomings of present experimental and modeling techniques and gives an outlook on future developments.

Категории:
Год:
2002
Издание:
1
Издательство:
Springer-Verlag Berlin Heidelberg
Язык:
english
Страницы:
404
ISBN 10:
3662049740
ISBN 13:
9783662049747
Серия:
Springer Series in Materials Science 57
Файл:
PDF, 17.73 MB
IPFS:
CID , CID Blake2b
english, 2002
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